Tachikawa (Wuxi) Semiconductor Equipment Co., Ltd.

Tachikawa (Wuxi) Semiconductor Equipment Co., Ltd., a subsidiary of Tachikawa (Zhuhai) Intelligent Technology Equipment Co., Ltd.(Group HQ), serves as the Group’s core R&D and manufacturing base for semiconductor inspection equipments, with regional subsidiaries in Zhuhai, Wuxi, Mingguang, and Hangzhou, the Group maintains an integrated cross-regional footprint covering R&D, production, sales, and service.

Wuxi Tachikawa focuses on probe station systems (TGG‑P200, P300, T200, T300 series), complemented by wafer cleaning and grinding/thinning equipment, supporting CP testing in IC wafer manufacturing.

Through a Sino‑Japanese collaborative R&D model, we have developed proprietary technologies in optical image processing and precision motion control, already deployed in our products. Our supply chain is stable, backed by robust domestic industrial resources.

In 2023, we were certified as a Jiangsu High‑Tech Enterprise. By June 2026, the Group holds 65 IP assets, including 15 invention patents (wafer alignment, probe contact control) and 25 software copyrights for TGG control systems. We remain committed to providing customized CP test solutions that address customers’ critical inspection challenges.

  • 60+

    Over 60 patents

  • 8‑inch

    8‑inch auto prober

  • 12‑inch

    12‑inch auto prober

2016

Established in 2016, TOT Precision Co., Ltd in Japan


2016

2017

In 2017, it was officially renamed as Tachikawa Technology Research Co., Ltd


2017

2020

Tachikawa Kansai Branch was established in 2020


2020

2021

Tachikawa(Zhuhai) Intelligent Technology Equipment Co., Ltd was established 

Tachikawa(Wuxi) Semiconductor Equipment Co., Ltd was established


2021

2025

 Mingguang Tachikawa Precision Equipment Co., Ltd was established in 2025


2025

2026

Tachikawa (Hangzhou) Semiconductor Equipment Co., Ltd was established in 2026

2026
2016
2017
2020
2021
2025
2026