Tachikawa (Wuxi) Semiconductor Equipment Co., Ltd.
Tachikawa (Wuxi) Semiconductor Equipment Co., Ltd., a subsidiary of Tachikawa (Zhuhai) Intelligent Technology Equipment Co., Ltd.(Group HQ), serves as the Group’s core R&D and manufacturing base for semiconductor inspection equipments, with regional subsidiaries in Zhuhai, Wuxi, Mingguang, and Hangzhou, the Group maintains an integrated cross-regional footprint covering R&D, production, sales, and service.
Wuxi Tachikawa focuses on probe station systems (TGG‑P200, P300, T200, T300 series), complemented by wafer cleaning and grinding/thinning equipment, supporting CP testing in IC wafer manufacturing.
Through a Sino‑Japanese collaborative R&D model, we have developed proprietary technologies in optical image processing and precision motion control, already deployed in our products. Our supply chain is stable, backed by robust domestic industrial resources.
In 2023, we were certified as a Jiangsu High‑Tech Enterprise. By June 2026, the Group holds 65 IP assets, including 15 invention patents (wafer alignment, probe contact control) and 25 software copyrights for TGG control systems. We remain committed to providing customized CP test solutions that address customers’ critical inspection challenges.

60+
Over 60 patents
8‑inch
8‑inch auto prober
12‑inch
12‑inch auto prober
2016
Established in 2016, TOT Precision Co., Ltd in Japan
2017
In 2017, it was officially renamed as Tachikawa Technology Research Co., Ltd
2020
Tachikawa Kansai Branch was established in 2020
2021
Tachikawa(Zhuhai) Intelligent Technology Equipment Co., Ltd was established
Tachikawa(Wuxi) Semiconductor Equipment Co., Ltd was established
2025
Mingguang Tachikawa Precision Equipment Co., Ltd was established in 2025
2026
Tachikawa (Hangzhou) Semiconductor Equipment Co., Ltd was established in 2026